| |
Nanolithosolution provides total solution of patterning of 3D nanostructures with sub-20 nm resolution and accurate overlay alignment using existing semiconductor fabrication facility. Our technology enable anyone with existing photolithography process to archive nano-scale patterning. We provides all the necessary builting blocks, that includes:
nano-fabrication module and controller,
chemicals,
auto ReleaseTM imprinting mold substract,
imprint fabrication process.
Nanolithosolution’s technology is particular suitable for customers in the research and development, where going beyond traditional photolithography scale is required.
Applications:
optical devices, displays, data storage, biotech, semiconductor ICs, chemical synthesis, and advanced materials.
|
 |
