Equipment

 
 
 

Nanoimprinting module: AR-NIM-100

Our nanoimprinting module conveniently fits into a traditional aligner's wafer and mask holder. It allows precise, accurate, and complete imprinting and subsequent mold separation in one easy step.

 
 

Nanoimprinting controller: AR-IMC-100

Nanolithosolution's controller provides semiautomatic control of the entire imprinting process. Users simply follow device prompts to complete the imprint process. 

 
Advantages

- Simple and robust processes: proven through research by some of the world's leading nanotechnology institutions.
- Precision alignment: mask alignment is limited only by photolithography aligner capability.
- Easy to use: technicians familiar with semiconductor processing can be trained in a few hours.
- No disruption of existing processes and no additional equipment footprint required.

 

 

 

 


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