Equipments

 
 
 

Nanoimprinting module: AR-NIM-100

The nanoimprinting module is a set of equipment fit into aligner wafer holder and mask holder.  It precisely holds imprint mold and wafer and accurate complete imprinting and separation of imprint mold with one easy step

 
 

Nanoimprinting controller: AR-IMC-100

Nanoimprinting controller provide semiautomatic control of the imprinting process.  User just follows the flow of the controller to complete the whole process. 

 
Advantages

- Simple and Robust process: proven through many of the world leading research works.
- Precision alignment: mask alignment is limited only by photolithography aligner capability.
- Easy to use: a person familiar with semiconductor process can be trained with in a few hours.
- No disruption with existing process, No extra equipment footprint required.

 

 

 

 


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